Edge (nm)	(%)
610	0.01568727
609.9	0.01252649
609.8	0.01116331
609.7	0.01877315
609.6	0.01828737
609.5	0.01604786
609.4	0.01379444
609.3	0.01645446
609.2	0.01999402
609.1	0.01551714
609	0.02126732
608.9	0.02477692
608.8	0.0176764
608.7	0.024289
608.6	0.02426974
608.5	0.0277558
608.4	0.02419163
608.3	0.02284771
608.2	0.02411887
608.1	0.03023713
608	0.03542021
607.9	0.0301312
607.8	0.03534638
607.7	0.02831862
607.6	0.03654157
607.5	0.04211841
607.4	0.03555824
607.3	0.03939205
607.2	0.04188836
607.1	0.04399412
607	0.04050592
606.9	0.04690559
606.8	0.04806547
606.7	0.05357062
606.6	0.05987934
606.5	0.05001929
606.4	0.05885107
606.3	0.05960756
606.2	0.06627473
606.1	0.06745922
606	0.07496848
605.9	0.07064354
605.8	0.07510116
605.7	0.07757393
605.6	0.07746907
605.5	0.08740081
605.4	0.0931114
605.3	0.0967066
605.2	0.10113533
605.1	0.10144563
605	0.1084231
604.9	0.1220228
604.8	0.1229965
604.7	0.130754
604.6	0.1350019
604.5	0.136853
604.4	0.1436796
604.3	0.1504527
604.2	0.1515441
604.1	0.1606819
604	0.167134
603.9	0.1722486
603.8	0.1850672
603.7	0.1879027
603.6	0.1911662
603.5	0.2054186
603.4	0.2073232
603.3	0.219136
603.2	0.2244325
603.1	0.2334098
603	0.2317727
602.9	0.2500055
602.8	0.2634233
602.7	0.2680243
602.6	0.2802223
602.5	0.2891461
602.4	0.3030989
602.3	0.3073468
602.2	0.3236536
602.1	0.3401958
602	0.3553577
601.9	0.3780096
601.8	0.3958465
601.7	0.4188087
601.6	0.4324298
601.5	0.434634
601.4	0.4585057
601.3	0.481821
601.2	0.520555
601.1	0.5564642
601	0.5876761
600.9	0.6274801
600.8	0.6623728
600.7	0.6955
600.6	0.737872
600.5	0.7814531
600.4	0.834172
600.3	0.8820545
600.2	0.9455697
600.1	0.9910554
600	1.054485
599.9	1.123714
599.8	1.199791
599.7	1.268913
599.6	1.356867
599.5	1.442467
599.4	1.53759
599.3	1.654862
599.2	1.762932
599.1	1.892188
599	2.022621
598.9	2.16675
598.8	2.326287
598.7	2.490211
598.6	2.683774
598.5	2.880226
598.4	3.079888
598.3	3.312399
598.2	3.572837
598.1	3.844938
598	4.152456
597.9	4.495498
597.8	4.894501
597.7	5.271462
597.6	5.724714
597.5	6.131421
597.4	6.713394
597.3	7.260699
597.2	7.888682
597.1	8.509496
597	9.203712
596.9	10.012418
596.8	10.84445
596.7	11.80317
596.6	12.84749
596.5	13.98276
596.4	15.21326
596.3	16.52615
596.2	17.92357
596.1	19.43334
596	21.12501
595.9	22.88302
595.8	24.68169
595.7	26.63658
595.6	28.69205
595.5	30.82135
595.4	33.18177
595.3	35.53042
595.2	38.13587
595.1	40.553
595	43.10816
594.9	45.56381
594.8	48.09971
594.7	50.4612
594.6	52.87084
594.5	54.91989
594.4	56.92828
594.3	58.85749
594.2	60.60052
594.1	62.16379
594	63.66286
593.9	64.91904
593.8	65.93768
593.7	66.83541
593.6	67.58334
593.5	68.11406
593.4	68.4907
593.3	68.81063
593.2	68.93154
593.1	69.09311
593	69.06101
592.9	68.96471
592.8	68.87911
592.7	68.65976
592.6	68.48428
592.5	68.30131
592.4	68.09266
592.3	67.8594
592.2	67.60474
592.1	67.4849
592	67.19707
591.9	67.03764
591.8	66.81722
591.7	66.70059
591.6	66.59359
591.5	66.45342
591.4	66.41918
591.3	66.39885
591.2	66.34321
591.1	66.32716
591	66.31325
590.9	66.39671
590.8	66.48338
590.7	66.53581
590.6	66.63104
590.5	66.83648
590.4	66.87714
590.3	67.17139
590.2	67.25485
590.1	67.56943
590	67.81767
589.9	68.06698
589.8	68.35909
589.7	68.51317
589.6	68.89837
589.5	69.19369
589.4	69.55
589.3	69.88491
589.2	70.2669
589.1	70.5665
589	70.96133
588.9	71.3155
588.8	71.73494
588.7	72.08162
588.6	72.47431
588.5	72.90552
588.4	73.2308
588.3	73.6481
588.2	74.02688
588.1	74.42171
588	74.84864
587.9	75.23812
587.8	75.54735
587.7	75.89938
587.6	76.25248
587.5	76.65801
587.4	77.02502
587.3	77.38133
587.2	77.6927
587.1	78.09181
587	78.44491
586.9	78.78945
586.8	79.06765
586.7	79.41861
586.6	79.76315
586.5	79.99962
586.4	80.27996
586.3	80.54853
586.2	80.83315
586.1	81.1274
586	81.38634
585.9	81.63886
585.8	81.87105
585.7	82.09468
585.6	82.29263
585.5	82.5291
585.4	82.75915
585.3	83.06303
585.2	83.26419
585.1	83.35728
585	83.62157
584.9	83.79384
584.8	83.99928
584.7	84.14373
584.6	84.4123
584.5	84.49255
584.4	84.66054
584.3	84.81355
584.2	85.02327
584.1	85.19661
584	85.28435
583.9	85.43201
583.8	85.51333
583.7	85.68239
583.6	85.82898
583.5	85.88248
583.4	86.1029
583.3	86.17994
583.2	86.34044
583.1	86.43888
583	86.5737
582.9	86.62613
582.8	86.75667
582.7	86.85618
582.6	87.04343
582.5	87.10549
582.4	87.17611
582.3	87.18788
582.2	87.33447
582.1	87.46715
582	87.60304
581.9	87.57201
581.8	87.76889
581.7	87.84807
581.6	87.86733
581.5	87.97219
581.4	88.03318
581.3	88.12627
581.2	88.15944
581.1	88.20866
581	88.32529
580.9	88.45048
580.8	88.41838
580.7	88.50077
580.6	88.6174
580.5	88.67304
580.4	88.72226
580.3	88.7886
580.2	88.7886
580.1	88.86992
580	88.88383
579.9	88.9491
579.8	88.84959
579.7	88.95659
579.6	88.95766
579.5	88.98441
579.4	89.00581
579.3	89.07001
579.2	89.04112
579.1	89.06466
579	89.09248
578.9	89.00046
578.8	88.99725
578.7	88.98013
578.6	88.89988
578.5	88.89132
578.4	88.85708
578.3	88.73617
578.2	88.74473
578.1	88.6816
578	88.54357
577.9	88.44834
577.8	88.2857
577.7	88.20117
577.6	88.12948
577.5	87.86733
577.4	87.68757
577.3	87.51102
577.2	87.2906
577.1	87.1515
577	86.94071
576.9	86.67856
576.8	86.4774
576.7	86.19171
576.6	86.02907
576.5	85.73054
576.4	85.46411
576.3	85.10031
576.2	84.81997
576.1	84.46687
576	84.26464
575.9	83.81524
575.8	83.47391
575.7	83.19036
575.6	82.85652
575.5	82.54729
575.4	82.18242
575.3	81.9192
575.2	81.58536
575.1	81.19588
575	80.88558
574.9	80.55174
574.8	80.25749
574.7	79.9504
574.6	79.77599
574.5	79.3833
574.4	79.09868
574.3	78.77875
574.2	78.61825
574.1	78.50055
574	78.25873
573.9	78.1742
573.8	78.10037
573.7	77.98267
573.6	77.88958
573.5	77.84892
573.4	77.84892
573.3	77.8211
573.2	77.88316
573.1	78.10251
573	78.22449
572.9	78.3133
572.8	78.59899
572.7	78.77768
572.6	79.04197
572.5	79.39935
572.4	79.70323
572.3	80.04991
572.2	80.35914
572.1	80.79784
572	81.04715
571.9	81.47515
571.8	81.76833
571.7	81.93097
571.6	82.12464
571.5	82.1974
571.4	82.15567
571.3	82.03369
571.2	81.72339
571.1	81.30074
571	80.59561
570.9	79.74068
570.8	78.48129
570.7	77.12025
570.6	75.37722
570.5	73.27788
570.4	71.16998
570.3	68.71005
570.2	66.13242
570.1	63.21988
570	60.34372
569.9	56.92293
569.8	53.80388
569.7	50.48902
569.6	46.99654
569.5	43.81115
569.4	40.71564
569.3	37.44572
569.2	34.66693
569.1	31.65167
569	29.22705
568.9	26.73288
568.8	24.55436
568.7	22.5021
568.6	20.58573
568.5	18.74747
568.4	17.01621
568.3	15.53854
568.2	14.1668
568.1	12.91169
568	11.69938
567.9	10.70214
567.8	9.711427
567.7	8.872654
567.6	8.10204
567.5	7.402046
567.4	6.760688
567.3	6.205572
567.2	5.671428
567.1	5.159861
567	4.728009
566.9	4.313919
566.8	3.970235
566.7	3.631687
566.6	3.324383
566.5	3.053673
566.4	2.806717
566.3	2.597639
566.2	2.391129
566.1	2.195426
566	2.030646
565.9	1.877957
565.8	1.733079
565.7	1.590555
565.6	1.475851
565.5	1.364143
565.4	1.253398
565.3	1.156028
565.2	1.079416
565.1	0.9992409
565	0.9152031
564.9	0.8485528
564.8	0.7998678
564.7	0.7450303
564.6	0.6909846
564.5	0.6314284
564.4	0.5810956
564.3	0.5343901
564.2	0.5048046
564.1	0.4622614
564	0.4352653
563.9	0.408419
563.8	0.3719641
563.7	0.3451392
563.6	0.3186139
563.5	0.2982304
563.4	0.267179
563.3	0.2560724
563.2	0.2380643
563.1	0.2300607
563	0.1918189
562.9	0.1939589
562.8	0.1749343
562.7	0.1462904
562.6	0.1433051
562.5	0.1252328
562.4	0.1242591
562.3	0.1138159
562.2	0.10444056
562.1	0.08986502
562	0.0846049
561.9	0.08244136
561.8	0.0629909
561.7	0.06606608
561.6	0.06743675
561.5	0.04803872
561.4	0.0493912
561.3	0.03922727
561.2	0.04362176
561.1	0.02864176
561	0.01850244
560.9	0.01938198
560.8	0.0123264
560.7	0.0127758
560.6	0.0185217
560.5	0.010129369
560.4	0.007921745
560.3	-0.007532372
560.2	-0.003118515
560.1	-0.001794604
560	-0.01415717
559.9	-0.008424324
559.8	-0.00886388
559.7	-0.01548611
559.6	-0.0128507
559.5	-0.02567358
559.4	-0.02036531
559.3	-0.02522739
559.2	-0.03317963
559.1	-0.03097757
559	-0.02214044
558.9	-0.03010873
558.8	-0.02259519
558.7	-0.03319782
558.6	-0.02879477
558.5	-0.03588459
558.4	-0.02613047
558.3	-0.03500933
558.2	-0.03721567
558.1	-0.03855424
558	-0.03858741
557.9	-0.045261
557.8	-0.03504571
557.7	-0.03459524
557.6	-0.03324918
557.5	-0.03238569
557.4	-0.05237436
557.3	-0.04349657
557.2	-0.04925852
557.1	-0.03817653
557	-0.04661669
556.9	-0.04617585
556.8	-0.04261168
556.7	-0.04040748
556.6	-0.04753154
556.5	-0.04311244
556.4	-0.04443175
556.3	-0.04448953
556.2	-0.04355435
556.1	-0.04134908
556	-0.04266839
555.9	-0.04534232
555.8	-0.05340798
555.7	-0.04533697
555.6	-0.04717309
555.5	-0.04714634
555.4	-0.04138118
555.3	-0.03871046
555.2	-0.04048452
555.1	-0.05164676
555	-0.04497424
554.9	-0.05431106
554.8	-0.03518481
554.7	-0.04231422
554.6	-0.04144431
554.5	-0.04990587
554.4	-0.04499136
554.3	-0.04229496
554.2	-0.04057333
554.1	-0.03969486
554	-0.04459974
553.9	-0.05125621
553.8	-0.04240731
553.7	-0.03435449
553.6	-0.04103664
553.5	-0.04685102
553.4	-0.05038309
553.3	-0.04729935
553.2	-0.05041733
553.1	-0.03883244
553	-0.04730577
552.9	-0.03973231
552.8	-0.04154168
552.7	-0.04196219
552.6	-0.03843547
552.5	-0.04288132
552.4	-0.04464147
552.3	-0.04423808
552.2	-0.05225024
552.1	-0.03843868
552	-0.03263928
551.9	-0.04287811
551.8	-0.03667104
551.7	-0.03844831
551.6	-0.03672133
551.5	-0.03711723
551.4	-0.03357232
551.3	-0.03314111
551.2	-0.03003597
551.1	-0.04119393
551	-0.04159732
550.9	-0.03850288
550.8	-0.03224338
550.7	-0.03091016
550.6	-0.04166366
550.5	-0.03722316
550.4	-0.03005523
550.3	-0.03587282
550.2	-0.0363051
550.1	-0.03769717
550	-0.0367973
549.9	-0.03814229
549.8	-0.0475401
549.7	-0.04174284
549.6	-0.05251988
549.5	-0.04130949
549.4	-0.04713029
549.3	-0.03412337
549.2	-0.03858313
549.1	0.0003762655
549	-0.009933024
548.9	-0.02743694
548.8	-0.03459524
548.7	-0.02563185
548.6	-0.01891118
548.5	-0.02563399
548.4	-0.02382676
548.3	-0.02521455
548.2	-0.03015902
548.1	-0.03059451
548	-0.01265275
547.9	-0.01895184
547.8	-0.010406927
547.7	-0.01758973
547.6	-0.01981533
547.5	-0.01625758
547.4	-0.01310964
547.3	-0.01266345
547.2	-0.01986348
547.1	-0.02526805
547	-0.02030967
546.9	-0.0320251
546.8	-0.02212546
546.7	-0.0212288
546.6	-0.02350576
546.5	-0.009085156
546.4	-0.02620216
546.3	-0.01269127
546.2	-0.01540479
546.1	-0.006843399
546	-0.01226006
545.9	-0.01225792
545.8	-0.004144431
545.7	-0.000991569
545.6	-0.005042803
545.5	-0.001439043
545.4	-0.006384155
545.3	-0.01717029
545.2	-0.01266131
545.1	-0.01308503
545	-0.004996044
544.9	-0.004079696
544.8	-0.008076039
544.7	-0.007158621
544.6	-0.00581224
544.5	0.002611228
544.4	0.002610586
544.3	0.006141693
544.2	-0.003990993
544.1	-0.00310514
544	-0.00485138
543.9	0.0017334
543.8	-0.001769245
543.7	0.006986244
543.6	-0.001760792
543.5	-0.002189969
543.4	0.00435597
543.3	-0.003050035
543.2	0.009575002
543.1	0.002174775
543	-0.005636546
542.9	-0.004331788
542.8	0.009545898
542.7	-0.00128507
542.6	-0.0008515702
542.5	0.0008814232
542.4	0.001314281
542.3	0.003901434
542.2	0.009510374
542.1	-0.000834386
542	0.002180767
541.9	0.0004599288
541.8	-0.0003967667
541.7	-0.00211218
541.6	0.003892018
541.5	0.000037985
541.4	-0.0008154363
541.3	0.003894158
541.2	-0.005083891