Edge (nm)	(%)
580	0.006479599
579.9	0.005228983
579.8	0.01114833
579.7	0.006088942
579.6	0.004388391
579.5	0.001833445
579.4	0.004402194
579.3	0.003539988
579.2	0.008723603
579.1	0.005269108
579	0.005278631
578.9	0.00702776
578.8	0.005290294
578.7	0.004420063
578.6	0.004419528
578.5	0.003981684
578.4	0.002654563
578.3	0.007538257
578.2	0.005766016
578.1	0.003988853
578	0.008473865
577.9	0.004888616
577.8	0.004440607
577.7	0.00308588
577.6	0.005812668
577.5	0.003082884
577.4	0.004454303
577.3	0.007211265
577.2	0.002160865
577.1	0.006771495
577	0.005389376
576.9	0.002258449
576.8	0.003110597
576.7	0.005688762
576.6	0.003971733
576.5	0.005268359
576.4	0.007882369
576.3	0.009193012
576.2	0.009212914
576.1	0.004414927
576	0.002221106
575.9	0.004860903
575.8	0.00750712
575.7	0.006195835
575.6	0.005310517
575.5	0.006208247
575.4	0.005324106
575.3	0.01248904
575.2	0.004882838
575.1	0.004888937
575	0.001282502
574.9	0.004891077
574.8	0.002632521
574.7	0.004449702
574.6	0.003079995
574.5	0.00399752
574.4	0.009949288
574.3	0.005380602
574.2	0.002614973
574.1	0.002613047
574	0.008631476
573.9	0.003107173
573.8	0.00872264
573.7	0.003534959
573.6	0.005275207
573.5	0.003974194
573.4	0.004411396
573.3	-0.0008340971
573.2	0.002658094
573.1	0.006610139
573	0.00486101
572.9	0.004862187
572.8	0.002651674
572.7	0.0008756238
572.6	0.00620707
572.5	0.005762699
572.4	0.002643007
572.3	0.004431405
572.2	0.009823456
572.1	0.004886583
572	0.003535494
571.9	0.002181623
571.8	0.003987569
571.7	0.006710398
571.6	0.006267739
571.5	0.001259069
571.4	0.008561177
571.3	0.005822833
571.2	0.005834068
571.1	0.005373112
571	0.002615508
570.9	0.006307757
570.8	0.002148774
570.7	0.003106424
570.6	0.005260441
570.5	0.005695503
570.4	0.00613217
570.3	0.003104391
570.2	0.004835865
570.1	0.002663551
570	0.004408507
569.9	0.005676671
569.8	0.005681914
569.7	0.004827091
569.6	0.003534638
569.5	0.006558886
569.4	0.004397807
569.3	0.003534745
569.2	0.007872632
569.1	0.006139874
569	0.002229452
568.9	0.005710376
568.8	0.00528259
568.7	0.007034822
568.6	0.005728352
568.5	0.006164377
568.4	0.004854376
568.3	0.005739052
568.2	0.01104026
568.1	0.002207089
568	0.003976869
567.9	0.007529697
567.8	0.006645235
567.7	0.003087592
567.6	0.003978367
567.5	0.006215202
567.4	0.006221408
567.3	0.006666742
567.2	0.002184405
567.1	0.005788914
567	0.005336732
566.9	0.003082991
566.8	-0.001895077
566.7	0.004442212
566.6	0.00398682
566.5	0.003992812
566.4	0.006725806
566.3	0.00444799
566.2	0.004451307
566.1	0.005825187
566	0.004910016
565.9	0.004450558
565.8	0.00353421
565.7	0.009064505
565.6	0.005665329
565.5	0.00652914
565.4	0.003958679
565.3	0.003533675
565.2	0.00395686
565.1	0.003529716
565	0.006081773
564.9	0.004804835
564.8	0.006924505
564.7	0.01115368
564.6	0.003531749
564.5	0.004377798
564.4	0.006071715
564.3	0.006912521
564.2	0.008603977
564.1	0.007761245
564	0.008178866
563.9	0.006066258
563.8	0.003528753
563.7	0.004375872
563.6	0.004796061
563.5	0.003952473
563.4	0.004797666
563.3	0.004795205
563.2	0.003529823
563.1	0.005217855
563	0.002264334
562.9	0.008172981
562.8	0.005637509
562.7	0.004375872
562.6	0.005214966
562.5	0.006061978
562.4	0.006061122
562.3	0.006485912
562.2	0.01154851
562.1	0.005637616
562	0.003532284
561.9	0.006059838
561.8	0.006486768
561.7	0.004373839
561.6	0.008177368
561.5	0.00817159
561.4	0.006483879
561.3	0.003106745
561.2	0.006908562
561.1	-0.0002742945
561	0.005221065
560.9	0.00521732
560.8	0.00479574
560.7	0.00732843
560.6	0.003951082
560.5	0.004373411
560.4	0.002259947
560.3	0.007755146
560.2	0.005639328
560.1	0.006490085
560	0.0094481
559.9	0.008181327
559.8	0.005641575
559.7	0.006065509
559.6	0.00649062
559.5	0.008604833
559.4	0.0060669
559.3	0.005639542
559.2	0.006489122
559.1	0.006910167
559	0.006915945
558.9	0.0073402
558.8	0.008607401
558.7	0.006494365
558.6	0.006491369
558.5	0.006914447
558.4	0.006493616
558.3	0.007339879
558.2	0.006494151
558.1	0.00861136
558	0.005645427
557.9	0.007337739
557.8	0.006070538
557.7	0.003951082
557.6	0.008196949
557.5	0.008621846
557.4	0.003524473
557.3	0.006920867
557.2	0.005649279
557.1	0.007345443
557	-0.001568513
556.9	0.009041607
556.8	0.01116331
556.7	0.004372127
556.6	0.002249889
556.5	0.001401379
556.4	0.008199196
556.3	0.01074494
556.2	0.00861992
556.1	0.01286675
556	0.00904792
555.9	0.008201657
555.8	0.008196628
555.7	0.009900175
555.6	0.005224917
555.5	0.01075778
555.4	0.009050488
555.3	0.009047278
555.2	0.004376942
555.1	0.008624093
555	0.008623665
554.9	0.01160201
554.8	0.006925896
554.7	0.009483731
554.6	0.009474636
554.5	0.009484694
554.4	0.01161164
554.3	0.009061402
554.2	0.01374094
554.1	0.009479772
554	0.0124762
553.9	0.01289029
553.8	0.01332471
553.7	0.01332685
553.6	0.01289136
553.5	0.0150335
553.4	0.01204713
553.3	0.0167455
553.2	0.01588629
553.1	0.01588843
553	0.01674015
552.9	0.02014917
552.8	0.01590448
552.7	0.0158895
552.6	0.01932848
552.5	0.01973722
552.4	0.02229452
552.3	0.01674336
552.2	0.02186973
552.1	0.02317406
552	0.02316229
551.9	0.02103727
551.8	0.02529801
551.7	0.02744122
551.6	0.02872308
551.5	0.02742624
551.4	0.02874127
551.3	0.03296991
551.2	0.03259113
551.1	0.03300415
551	0.03260718
550.9	0.03599052
550.8	0.03813266
550.7	0.04157485
550.6	0.0411308
550.5	0.04414285
550.4	0.04713885
550.3	0.04887011
550.2	0.05185862
550.1	0.05356848
550	0.05358239
549.9	0.05955406
549.8	0.06131207
549.7	0.06641169
549.6	0.07031184
549.5	0.07118603
549.4	0.07761031
549.3	0.08364725
549.2	0.08827714
549.1	0.08884103
549	0.09424239
548.9	0.10116743
548.8	0.10673999
548.7	0.1110339
548.6	0.1222047
548.5	0.1316956
548.4	0.1329796
548.3	0.1442146
548.2	0.1535343
548.1	0.1639026
548	0.172484
547.9	0.1880097
547.8	0.1991912
547.7	0.2086821
547.6	0.229622
547.5	0.244281
547.4	0.2583622
547.3	0.2772691
547.2	0.2972888
547.1	0.3214922
547	0.3445079
546.9	0.3743074
546.8	0.3962638
546.7	0.4233348
546.6	0.4606885
546.5	0.4946931
546.4	0.5353745
546.3	0.5751999
546.2	0.6197654
546.1	0.6716818
546	0.7292585
545.9	0.7862039
545.8	0.8620455
545.7	0.9382723
545.6	1.0220961
545.5	1.113977
545.4	1.219479
545.3	1.326051
545.2	1.4445
545.1	1.587238
545	1.729548
544.9	1.896147
544.8	2.068524
544.7	2.266474
544.6	2.503372
544.5	2.751291
544.4	3.033985
544.3	3.344499
544.2	3.713863
544.1	4.100133
544	4.536158
543.9	5.020975
543.8	5.579408
543.7	6.178929
543.6	6.824139
543.5	7.54671
543.4	8.340864
543.3	9.297551
543.2	10.334167
543.1	11.45756
543	12.71695
542.9	14.12293
542.8	15.59311
542.7	17.24412
542.6	18.91118
542.5	20.86179
542.4	22.8231
542.3	24.91281
542.2	26.83239
542.1	28.84185
542	31.11239
541.9	33.18712
541.8	35.3635
541.7	37.34193
541.6	39.33534
541.5	41.04948
541.4	42.75399
541.3	44.14071
541.2	45.49533
541.1	46.52895
541	47.46092
540.9	48.07296
540.8	48.61117
540.7	49.09909
540.6	49.51104
540.5	49.60627
540.4	49.84274
540.3	49.87377
540.2	49.90159
540.1	49.8727
540	49.76784
539.9	49.79138
539.8	49.69722
539.7	49.68438
539.6	49.64907
539.5	49.62339
539.4	49.65656
539.3	49.6052
539.2	49.68545
539.1	49.83311
539	49.93262
538.9	50.09526
538.8	50.3328
538.7	50.5682
538.6	50.87743
538.5	51.18452
538.4	51.4991
538.3	51.88644
538.2	52.33691
538.1	52.75528
538	53.23678
537.9	53.7033
537.8	54.29608
537.7	54.90384
537.6	55.45596
537.5	56.17072
537.4	56.7207
537.3	57.48254
537.2	58.12775
537.1	58.81683
537	59.54336
536.9	60.25812
536.8	61.00605
536.7	61.62344
536.6	62.49763
536.5	63.22095
536.4	63.99135
536.3	64.77352
536.2	65.49149
536.1	66.25975
536	66.93171
535.9	67.73421
535.8	68.33127
535.7	69.0578
535.6	69.74795
535.5	70.36855
535.4	71.01911
535.3	71.51345
535.2	72.16936
535.1	72.73539
535	73.26397
534.9	73.79576
534.8	74.25158
534.7	74.72024
534.6	75.12363
534.5	75.56233
534.4	75.85979
534.3	76.29421
534.2	76.51677
534.1	76.85596
534	77.15877
533.9	77.29359
533.8	77.57607
533.7	77.70233
533.6	77.89172
533.5	78.14745
533.4	78.20416
533.3	78.42351
533.2	78.41923
533.1	78.58829
533	78.57545
532.9	78.62895
532.8	78.67175
532.7	78.63002
532.6	78.85365
532.5	78.81406
532.4	78.77768
532.3	78.80229
532.2	78.79159
532.1	78.86221
532	78.80443
531.9	78.82048
531.8	78.85044
531.7	78.82369
531.6	78.82904
531.5	78.75735
531.4	78.8269
531.3	78.7841
531.2	78.79908
531.1	78.83011
531	78.81834
530.9	78.85579
530.8	78.89752
530.7	78.9874
530.6	78.89859
530.5	79.03234
530.4	78.94032
530.3	79.01522
530.2	79.13399
530.1	79.1265
530	79.18535
529.9	79.12222
529.8	79.30412
529.7	79.36511
529.6	79.43466
529.5	79.43894
529.4	79.61656
529.3	79.72677
529.2	79.70751
529.1	79.94291
529	80.00925
528.9	80.04456
528.8	80.19864
528.7	80.24251
528.6	80.3784
528.5	80.49075
528.4	80.64483
528.3	80.73578
528.2	80.8385
528.1	80.98188
528	81.03859
527.9	81.16699
527.8	81.23761
527.7	81.38741
527.6	81.5126
527.5	81.62923
527.4	81.8015
527.3	81.79508
527.2	81.99945
527.1	82.06686
527	82.17921
526.9	82.3151
526.8	82.3579
526.7	82.50877
526.6	82.55264
526.5	82.71207
526.4	82.7431
526.3	82.88969
526.2	82.94426
526.1	83.00953
526	83.06089
525.9	83.11439
525.8	83.23851
525.7	83.26526
525.6	83.31876
525.5	83.37868
525.4	83.44609
525.3	83.48568
525.2	83.41934
525.1	83.57877
525	83.61087
524.9	83.58947
524.8	83.69433
524.7	83.71038
524.6	83.71252
524.5	83.70396
524.4	83.70289
524.3	83.67614
524.2	83.71894
524.1	83.67614
524	83.64297
523.9	83.77672
523.8	83.65581
523.7	83.74783
523.6	83.58626
523.5	83.55416
523.4	83.57984
523.3	83.39901
523.2	83.59268
523.1	83.47926
523	83.43539
522.9	83.40864
522.8	83.28666
522.7	83.28559
522.6	83.24814
522.5	83.22139
522.4	83.24172
522.3	83.15184
522.2	83.15077
522.1	83.04484
522	82.98706
521.9	82.9464
521.8	82.93142
521.7	82.79339
521.6	82.77306
521.5	82.81372
521.4	82.6468
521.3	82.65108
521.2	82.54087
521.1	82.51412
521	82.4114
520.9	82.41782
520.8	82.36432
520.7	82.3365
520.6	82.31617
520.5	82.17386
520.4	82.12571
520.3	82.12678
520.2	82.06579
520.1	81.96521
520	81.93311
519.9	81.78331
519.8	81.72339
519.7	81.67738
519.6	81.64635
519.5	81.48585
519.4	81.45589
519.3	81.37243
519.2	81.32535
519.1	81.14238
519	81.13596
518.9	80.99044
518.8	80.93373
518.7	80.80961
518.6	80.65018
518.5	80.4854
518.4	80.40622
518.3	80.29066
518.2	80.19222
518.1	80.04884
518	79.97073
517.9	79.73747
517.8	79.68076
517.7	79.5331
517.6	79.3084
517.5	79.27309
517.4	79.04732
517.3	78.91464
517.2	78.7841
517.1	78.58187
517	78.31223
516.9	78.18811
516.8	78.09288
516.7	77.84036
516.6	77.73336
516.5	77.53434
516.4	77.37063
516.3	77.2754
516.2	76.94263
516.1	76.83777
516	76.62805
515.9	76.56064
515.8	76.33808
515.7	76.12408
515.6	76.05453
515.5	75.86086
515.4	75.64044
515.3	75.50883
515.2	75.35368
515.1	75.20174
515	75.10116
514.9	75.06585
514.8	74.90321
514.7	74.68172
514.6	74.50838
514.5	74.49554
514.4	74.32862
514.3	74.18203
514.2	74.18203
514.1	74.00655
514	73.97124
513.9	73.83749
513.8	73.77008
513.7	73.74654
513.6	73.66415
513.5	73.65666
513.4	73.59674
513.3	73.55501
513.2	73.54324
513.1	73.48867
513	73.46513
512.9	73.50151
512.8	73.60423
512.7	73.47155
512.6	73.52826
512.5	73.53361
512.4	73.53147
512.3	73.6481
512.2	73.72086
512.1	73.75938
512	73.69732
511.9	73.81181
511.8	73.83856
511.7	74.00548
511.6	74.04079
511.5	73.99585
511.4	74.18952
511.3	74.1189
511.2	74.17347
511.1	74.2473
511	74.18096
510.9	74.10927
510.8	74.06647
510.7	74.03758
510.6	73.90597
510.5	73.73798
510.4	73.56999
510.3	73.31533
510.2	73.06067
510.1	72.66477
510	72.29669
509.9	71.8077
509.8	71.31122
509.7	70.79441
509.6	70.1171
509.5	69.40555
509.4	68.51745
509.3	67.71709
509.2	66.62034
509.1	65.6017
509	64.5959
508.9	63.36861
508.8	62.13918
508.7	60.74176
508.6	59.54657
508.5	58.21977
508.4	56.77848
508.3	55.2334
508.2	53.81137
508.1	52.31016
508	50.72977
507.9	49.15901
507.8	47.6685
507.7	46.0635
507.6	44.6618
507.5	43.1103
507.4	41.7193
507.3	40.30904
507.2	39.00257
507.1	37.73141
507	36.42815
506.9	35.22868
506.8	33.95324
506.7	32.86826
506.6	31.66023
506.5	30.63196
506.4	29.58657
506.3	28.66958
506.2	27.75473
506.1	26.89338
506	26.10158
505.9	25.3911
505.8	24.71486
505.7	24.06109
505.6	23.45654
505.5	22.86162
505.4	22.25814
505.3	21.77771
505.2	21.28444
505.1	20.83932
505	20.45305
504.9	20.01435
504.8	19.64841
504.7	19.29959
504.6	18.95612
504.5	18.64261
504.4	18.32268
504.3	17.99633
504.2	17.66891
504.1	17.30725
504	16.92419
503.9	16.5529
503.8	16.11313
503.7	15.6648
503.6	15.1512
503.5	14.63439
503.4	14.0384
503.3	13.42101
503.2	12.7758
503.1	12.12738
503	11.41583
502.9	10.66255
502.8	9.903278
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