Edge (nm)	(%)
525	0.029109
524.9	0.03007
524.8	0.033073
524.7	0.026907
524.6	0.03376
524.5	0.034117
524.4	0.03394
524.3	0.037704
524.2	0.036128
524.1	0.036449
524	0.037371
523.9	0.042461
523.8	0.043522
523.7	0.039419
523.6	0.038039
523.5	0.039998
523.4	0.046728
523.3	0.042393
523.2	0.049036
523.1	0.05504
523	0.048478
522.9	0.050685
522.8	0.054996
522.7	0.052869
522.6	0.061778
522.5	0.057932
522.4	0.057628
522.3	0.056035
522.2	0.061209
522.1	0.05901
522	0.059785
521.9	0.069141
521.8	0.065368
521.7	0.060644
521.6	0.07146
521.5	0.071505
521.4	0.073442
521.3	0.080322
521.2	0.077805
521.1	0.077478
521	0.080758
520.9	0.078152
520.8	0.098659
520.7	0.084732
520.6	0.090745
520.5	0.096066
520.4	0.094142
520.3	0.097144
520.2	0.10465
520.1	0.10749
520	0.1062
519.9	0.11201
519.8	0.11715
519.7	0.12248
519.6	0.1243
519.5	0.13084
519.4	0.13087
519.3	0.13341
519.2	0.13838
519.1	0.14507
519	0.14096
518.9	0.15226
518.8	0.1527
518.7	0.16805
518.6	0.1717
518.5	0.1744
518.4	0.17679
518.3	0.17891
518.2	0.18659
518.1	0.18977
518	0.19711
517.9	0.20813
517.8	0.20682
517.7	0.2174
517.6	0.22088
517.5	0.24097
517.4	0.23614
517.3	0.25716
517.2	0.2674
517.1	0.27164
517	0.27873
516.9	0.29669
516.8	0.29669
516.7	0.30188
516.6	0.3043
516.5	0.32637
516.4	0.35203
516.3	0.35617
516.2	0.36446
516.1	0.38526
516	0.39187
515.9	0.41168
515.8	0.41829
515.7	0.45028
515.6	0.47185
515.5	0.4826
515.4	0.50384
515.3	0.50187
515.2	0.52056
515.1	0.55626
515	0.57502
514.9	0.61608
514.8	0.61293
514.7	0.66885
514.6	0.67475
514.5	0.68136
514.4	0.70141
514.3	0.73142
514.2	0.76881
514.1	0.80184
514	0.85455
513.9	0.88925
513.8	0.95305
513.7	0.96715
513.6	0.99776
513.5	1.0485
513.4	1.1289
513.3	1.1546
513.2	1.2098
513.1	1.2545
513	1.3286
512.9	1.3406
512.8	1.4307
512.7	1.4974
512.6	1.5755
512.5	1.6505
512.4	1.715
512.3	1.835
512.2	1.9049
512.1	1.9812
512	2.0902
511.9	2.1625
511.8	2.2819
511.7	2.4402
511.6	2.5708
511.5	2.6715
511.4	2.8286
511.3	2.9561
511.2	3.1106
511.1	3.266
511	3.4398
510.9	3.648
510.8	3.85
510.7	4.0348
510.6	4.2456
510.5	4.4597
510.4	4.7073
510.3	4.9438
510.2	5.193
510.1	5.5318
510	5.811
509.9	6.0933
509.8	6.468
509.7	6.8707
509.6	7.2444
509.5	7.7184
509.4	8.123
509.3	8.6349
509.2	9.0674
509.1	9.6166
509	10.124
508.9	10.713
508.8	11.291
508.7	11.968
508.6	12.667
508.5	13.413
508.4	14.25
508.3	15.063
508.2	15.967
508.1	16.849
508	17.839
507.9	18.73
507.8	19.813
507.7	20.901
507.6	22.131
507.5	23.319
507.4	24.703
507.3	25.94
507.2	27.251
507.1	28.846
507	30.362
506.9	32.197
506.8	33.569
506.7	35.289
506.6	36.784
506.5	38.419
506.4	40.436
506.3	42.222
506.2	44.052
506.1	45.7
506	47.598
505.9	49.392
505.8	51.728
505.7	53.305
505.6	55.303
505.5	56.804
505.4	58.612
505.3	60.353
505.2	61.873
505.1	63.449
505	65.164
504.9	66.65
504.8	68.054
504.7	69.477
504.6	70.737
504.5	71.77
504.4	73.352
504.3	74.484
504.2	75.112
504.1	76.195
504	77.158
503.9	77.823
503.8	78.891
503.7	79.211
503.6	79.651
503.5	80.86
503.4	80.964
503.3	81.613
503.2	82.344
503.1	82.505
503	82.776
502.9	83.061
502.8	83.126
502.7	83.677
502.6	83.792
502.5	83.961
502.4	84.469
502.3	84.532
502.2	84.923
502.1	84.93
502	85.091
501.9	85.3
501.8	85.093
501.7	85.263
501.6	85.351
501.5	85.189
501.4	85.39
501.3	85.545
501.2	85.345
501.1	85.01
501	85.859
500.9	85.681
500.8	85.586
500.7	85.989
500.6	86.272
500.5	86.045
500.4	85.662
500.3	86.055
500.2	86.208
500.1	86.443
500	86.311
499.9	86.371
499.8	86.045
499.7	86.687
499.6	86.174
499.5	86.269
499.4	86.184
499.3	86.04
499.2	86.141
499.1	86.097
499	86.347
498.9	86.563
498.8	86.684
498.7	86.273
498.6	86.422
498.5	86.108
498.4	86.536
498.3	86.72
498.2	86.506
498.1	86.919
498	86.499
497.9	86.919
497.8	86.782
497.7	87.237
497.6	87.17
497.5	86.767
497.4	87.238
497.3	87.125
497.2	87.301
497.1	87.005
497	87.109
496.9	86.865
496.8	87.146
496.7	86.985
496.6	86.857
496.5	86.754
496.4	86.906
496.3	87.012
496.2	86.923
496.1	86.724
496	87.75
495.9	86.797
495.8	87.156
495.7	86.562
495.6	86.759
495.5	87.466
495.4	86.902
495.3	86.966
495.2	86.85
495.1	86.284
495	86.773
494.9	86.547
494.8	86.143
494.7	86.785
494.6	87.086
494.5	86.525
494.4	86.196
494.3	86.305
494.2	86.806
494.1	86.33
494	86.006
493.9	85.952
493.8	86.186
493.7	86.035
493.6	86.011
493.5	85.442
493.4	85.843
493.3	85.683
493.2	85.551
493.1	85.539
493	85.147
492.9	85.562
492.8	85.165
492.7	84.985
492.6	84.92
492.5	84.797
492.4	84.687
492.3	84.67
492.2	84.562
492.1	83.912
492	84.232
491.9	84.231
491.8	84.129
491.7	84.009
491.6	83.738
491.5	84.121
491.4	83.61
491.3	84.213
491.2	83.706
491.1	83.81
491	84.349
490.9	83.725
490.8	83.932
490.7	84.333
490.6	83.609
490.5	83.426
490.4	83.303
490.3	83.588
490.2	83.408
490.1	83.327
490	83.351
489.9	83.496
489.8	83.943
489.7	83.543
489.6	83.82
489.5	83.933
489.4	84.226
489.3	83.668
489.2	83.77
489.1	84.158
489	84.001
488.9	84.132
488.8	84.095
488.7	84.575
488.6	84.165
488.5	84.278
488.4	84.277
488.3	84.162
488.2	84.581
488.1	85.067
488	84.217
487.9	84.793
487.8	84.95
487.7	85.099
487.6	85.275
487.5	85.18
487.4	84.947
487.3	85.539
487.2	85.32
487.1	85.483
487	85.56
486.9	85.192
486.8	85.361
486.7	85.672
486.6	85.551
486.5	85.831
486.4	85.724
486.3	85.636
486.2	85.59
486.1	85.721
486	85.19
485.9	85.854
485.8	86.26
485.7	85.586
485.6	85.961
485.5	85.894
485.4	86.232
485.3	86.104
485.2	85.622
485.1	85.588
485	85.877
484.9	85.924
484.8	86.005
484.7	85.419
484.6	85.747
484.5	85.945
484.4	86.131
484.3	85.64
484.2	85.819
484.1	86.151
484	85.549
483.9	85.656
483.8	85.396
483.7	85.41
483.6	85.888
483.5	85.244
483.4	85.487
483.3	85.182
483.2	85.048
483.1	84.986
483	85.037
482.9	84.661
482.8	84.865
482.7	85.217
482.6	83.946
482.5	84.219
482.4	83.716
482.3	83.191
482.2	83.28
482.1	83.199
482	83.039
481.9	82.937
481.8	82.683
481.7	82.427
481.6	82.011
481.5	81.238
481.4	81.275
481.3	80.544
481.2	80.284
481.1	80.143
481	78.983
480.9	79.466
480.8	78.84
480.7	78.583
480.6	78.229
480.5	76.945
480.4	77.032
480.3	76.186
480.2	76.173
480.1	75.172
480	74.917
479.9	74.21
479.8	73.65
479.7	73.898
479.6	73.451
479.5	72.588
479.4	72.307
479.3	72.026
479.2	71.244
479.1	71.17
479	70.741
478.9	69.903
478.8	70.136
478.7	69.568
478.6	69.423
478.5	69.602
478.4	68.69
478.3	68.4
478.2	68.376
478.1	68.434
478	68.395
477.9	68.46
477.8	68.734
477.7	68.644
477.6	68.563
477.5	68.728
477.4	68.924
477.3	69.075
477.2	68.704
477.1	69.265
477	69.824
476.9	70.082
476.8	69.922
476.7	70.392
476.6	70.59
476.5	71.729
476.4	71.762
476.3	71.969
476.2	72.671
476.1	72.822
476	72.619
475.9	73.422
475.8	72.926
475.7	72.901
475.6	73.522
475.5	72.728
475.4	72.639
475.3	71.783
475.2	71.314
475.1	70.488
475	69.793
474.9	68.545
474.8	66.68
474.7	65.536
474.6	63.282
474.5	61.653
474.4	59.239
474.3	56.915
474.2	54.521
474.1	52.04
474	49.502
473.9	46.895
473.8	44.446
473.7	41.605
473.6	39.113
473.5	36.572
473.4	34.353
473.3	31.751
473.2	29.726
473.1	27.302
473	25.566
472.9	23.593
472.8	21.972
472.7	20.113
472.6	18.593
472.5	17.161
472.4	15.86
472.3	14.578
472.2	13.438
472.1	12.257
472	11.43
471.9	10.501
471.8	9.6773
471.7	8.9257
471.6	8.2728
471.5	7.545
471.4	7.0849
471.3	6.5463
471.2	5.9906
471.1	5.6109
471	5.1144
470.9	4.7532
470.8	4.3959
470.7	4.0716
470.6	3.8263
470.5	3.4924
470.4	3.2701
470.3	2.9989
470.2	2.8464
470.1	2.6799
470	2.454
469.9	2.2412
469.8	2.1391
469.7	1.9747
469.6	1.8291
469.5	1.6968
469.4	1.5924
469.3	1.4906
469.2	1.4241
469.1	1.3019
469	1.2167
468.9	1.154
468.8	1.0949
468.7	1.0254
468.6	0.96391
468.5	0.86905
468.4	0.83883
468.3	0.80991
468.2	0.75488
468.1	0.69663
468	0.6376
467.9	0.60864
467.8	0.57485
467.7	0.54638
467.6	0.51237
467.5	0.48372
467.4	0.46992
467.3	0.4352
467.2	0.41668
467.1	0.37646
467	0.37399
466.9	0.33343
466.8	0.32236
466.7	0.31747
466.6	0.29319
466.5	0.2664
466.4	0.25962
466.3	0.24301
466.2	0.22353
466.1	0.22755
466	0.22302
465.9	0.22421
465.8	0.19762
465.7	0.19061
465.6	0.17493
465.5	0.18215
465.4	0.1554
465.3	0.15026
465.2	0.1389
465.1	0.14149
465	0.13671
464.9	0.13062
464.8	0.12537
464.7	0.1163
464.6	0.1075
464.5	0.10027
464.4	0.089189
464.3	0.09472
464.2	0.091918
464.1	0.089029
464	0.093112
463.9	0.079698
463.8	0.073594
463.7	0.07647
463.6	0.075846
463.5	0.068483
463.4	0.065829
463.3	0.056679
463.2	0.055656
463.1	0.054287
463	0.052759
462.9	0.04986
462.8	0.050266
462.7	0.042481
462.6	0.046975
462.5	0.0502
462.4	0.042996
462.3	0.042028
462.2	0.038286
462.1	0.035644
462	0.028573
461.9	0.030558
461.8	0.031092
461.7	0.024862
461.6	0.027302
461.5	0.027288
461.4	0.025591
461.3	0.022373
461.2	0.023593
461.1	0.019396
461	0.016964
460.9	0.017084
460.8	0.010849
460.7	0.013761
460.6	0.017045
460.5	0.019062
460.4	0.013379
460.3	0.010808
460.2	0.0087219
460.1	0.0074932
460	0.0099907